A Study of Helium Ion Induced Secondary Electron Production

The scanning electron microscope (SEM) is a popular instrument used for imaging because of its high resolution images it can generate. However the new scanning helium ion scanning microscope (SHIM) can produce higher resolution and better contrast images than the conventional SEM. In both the micros...

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Bibliographic Details
Main Author: Ramachandra, Ranjan
Format: Others
Published: Trace: Tennessee Research and Creative Exchange 2009
Subjects:
Online Access:http://trace.tennessee.edu/utk_graddiss/103