Traceable Standard for Sub - 100nm Metrology
As we approach the 65nm technological node, transistor gates with dimensions of the order of 40nm are being manufactured. As the device performance is directly related to the dimensions of the gate, critical dimension (CD) control becomes an important part of the fabrication process. Characterizatio...
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Trace: Tennessee Research and Creative Exchange
2007
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| Online Access: | http://trace.tennessee.edu/utk_gradthes/276 |