Pulsed laser deposition of boron and boron nitride thin film

This thesis focuses on the preparation parameter and characterization of boron and boron nitride thin film. System is built composing of designing the geometry, substrate and target holder, pumping parts and plasma generated parts. Experiments with various conditions have been tried and the optimize...

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Bibliographic Details
Main Author: Tang, Siwei
Format: Others
Published: Trace: Tennessee Research and Creative Exchange 2011
Subjects:
Online Access:http://trace.tennessee.edu/utk_gradthes/1028