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Monte Carlo simulation of MeV ion implantation with computationally efficient models

Monte Carlo simulation of MeV ion implantation with computationally efficient models

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Bibliographic Details
Main Author: Wang, Greg
Format: Others
Language:English
Published: 2011
Subjects:
Ion implantation > Computer simulation
Monte Carlo method
Online Access:http://hdl.handle.net/2152/10872
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Internet

http://hdl.handle.net/2152/10872

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