Three-dimensional Monte Carlo simulation of ion implantation

Three-dimensional Monte Carlo simulation of ion implantation

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Bibliographic Details
Main Author: Li, Di
Format: Others
Language:English
Published: 2008
Subjects:
Ion implantation > Computer simulation
Monte Carlo method
Online Access:http://hdl.handle.net/2152/1101

Internet

http://hdl.handle.net/2152/1101

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