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Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

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Bibliographic Details
Main Author: Schaeffer, James Kenyon
Format: Others
Language:English
Published: 2008
Subjects:
Hafnium oxide
Dielectrics
Electrodes
Metal oxide semiconductor field-effect transistors
Online Access:http://hdl.handle.net/2152/1258
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Internet

http://hdl.handle.net/2152/1258

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