Advanced process control and optimal sampling in semiconductor manufacturing

Semiconductor manufacturing is characterized by a dynamic, varying environment and the technology to produce integrated circuits is always shifting in response to the demand for faster and new products, and the time between the development of a new profitable method of manufacturing and its transfer...

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Bibliographic Details
Main Author: Lee, Hyung Joo, 1979-
Format: Others
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/2152/17929