Fluid-structure interactions in microstructures
Radio-frequency microelectromechanical systems (RF MEMS) are widely used for contact actuators and capacitive switches. These devices typically consist of a metallic membrane which is activated by a time-periodic electrostatic force and makes periodic contact with a contact pad. The increase in swit...
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| Format: | Others |
| Language: | en_US |
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2013
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| Online Access: | http://hdl.handle.net/2152/21611 |