Fluid and solid mechanics in the step and flash imprint lithography process

Fluid and solid mechanics in the step and flash imprint lithography process

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Bibliographic Details
Main Author: Reddy, Shravanthi
Format: Others
Language:English
Published: 2008
Subjects:
Microlithography
Semiconductors
Online Access:http://hdl.handle.net/2152/2624

Internet

http://hdl.handle.net/2152/2624

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