Multivariate fault detection and visualization in the semiconductor industry

Multivariate fault detection and visualization in the semiconductor industry

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Bibliographic Details
Main Author: Chamness, Kevin Andrew
Format: Others
Language:English
Published: 2008
Subjects:
Fault location (Engineering) > Statistical methods
Nearest neighbor analysis (Statistics)
Multivariate analysis
Process control > Statistical methods
Semiconductors > Design and construction > Statistical methods
Online Access:http://hdl.handle.net/2152/2830

Internet

http://hdl.handle.net/2152/2830

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