Micromachined in-plane acoustic pressure gradient sensors
This work presents the fabrication, modeling, and characterization of two first-generation acoustic in-plane pressure gradient sensors. The first is a micromachined piezoelectric microphone. The microphone structure consists of a semi-rigid beam structure that rotates about torsional pivots in respo...
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| Format: | Others |
| Language: | en |
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2015
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| Online Access: | http://hdl.handle.net/2152/31015 |