Applications of photolithographic techniques : materials modeling for double-exposure lithography and development of shape-encoded biosensor arrays
Double-exposure lithography has shown promise as potential resolu- tion enhancement technique that is attractive because it is much cheaper than double-patterning lithography and it can be deployed on existing imaging tools. However, this technology is not possible without the development of new mat...
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| Format: | Others |
| Language: | English |
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2009
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| Online Access: | http://hdl.handle.net/2152/6562 |