Single-stage large-angle beam steering optical phased array on silicon nanomembrane

Single-stage large-angle beam steering optical phased array on silicon nanomembrane

In this paper, we present the results of the design and fabrication of a 12 channel nano-membrane-based optical phased array that allows for large angle beam steering operating at wavelength=1.55µm. Our device is fabricated on silicon-on-insulator using standard CMOS process. By implementing unequal...

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Bibliographic Details
Main Author: Kwong, David Nien
Format: Others
Language:English
Published: 2010
Subjects:
Silicon
SOI
MMI
Thermo-optic
Optics
Photonics
Beam steering
Opa
Online Access:http://hdl.handle.net/2152/ETD-UT-2010-05-1376

Internet

http://hdl.handle.net/2152/ETD-UT-2010-05-1376

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