Modeling and defect analysis of step and flash imprint lithography and photolithography
In 1960's Gordon Moore predicted that the increase in the number of components in integrated circuits would exponentially decrease the relative manufacturing cost per component with time. The semiconductor industry has managed to keep that pace for nearly 45 years and one of the main contributo...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | English |
| Published: |
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/2152/ETD-UT-2010-08-2029 |