Fluid management in immersion and imprint microlithography

Fluid management in immersion and imprint microlithography

The important roles of fluid dynamics in immersion lithography (IL) and step-and-flash imprint lithography (S FIL) are analyzed experimentally and theoretically. In IL there are many challenges with managing a fluid droplet between the lens and the wafer, including preventing separation of the flui...

Full description

Bibliographic Details
Main Author: Bassett, Derek William
Format: Others
Language:English
Published: 2011
Subjects:
Immersion lithography
Step-and-flash imprint lithography
S-FIL
Microlithography
Fluid dynamics
Immersion laser mask writing
Fluid instability
Template conformation
Template alignment
Lithography
Laser mask writing
Imprint lithography
Online Access:http://hdl.handle.net/2152/ETD-UT-2010-12-2043

Internet

http://hdl.handle.net/2152/ETD-UT-2010-12-2043

Similar Items