Modeling and prototyping of a micromachined optical microphone
A microelectromechanical systems (MEMS) optical microphone that measures the interference of light resulting from its passage through a diffraction grating and reflection from a vibrating diaphragm (JASA, v. 122, no. 4, 2007) is described. In the present embodiment, both the diffractive optical ele...
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| Format: | Others |
| Language: | English |
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2012
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| Online Access: | http://hdl.handle.net/2152/ETD-UT-2010-12-2644 |