Studying the effect of Cu microstructure on electromigration reliability using statistical simulation

Electromigration (EM) describes the mass transport in a metal driven by the momentum transfer from electron scattering with metal ions. This can develop into a degradation process due to void growth for on-chip interconnects when subjected to high electric current densities and eventual interconnec...

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Bibliographic Details
Main Author: Kraatz, Matthias
Format: Others
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/2152/ETD-UT-2011-12-4384