Variations in Radiation Response Due to Hydrogen: Mechanisms of Interface Trap Buildup and Annealing

Hydrogen produces variability in the radiation response of integrated circuits, whether incorporated in the oxide or present as a gas. The presence of molecular hydrogen can increase interface trap buildup and alter dose rate response. Defects with hydrogen incorporated in the oxide during processin...

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Bibliographic Details
Main Author: Hughart, David Russell
Other Authors: Sokrates T. Pantelides
Format: Others
Language:en
Published: VANDERBILT 2012
Subjects:
Online Access:http://etd.library.vanderbilt.edu/available/etd-12032012-190026/