Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields

Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields

The first objective of this dissertation is to present hybrid numerical-analytical approaches and reduced-order models to simulate microelectromechanical systems (MEMS) in multi-physics fields. These include electric actuation (AC and DC), squeeze-film damping, thermoelastic damping, and struc...

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Bibliographic Details
Main Author: Younis, Mohammad Ibrahim
Other Authors: Engineering Science and Mechanics
Format: Others
Published: Virginia Tech 2011
Subjects:
Primary and Secondary Excitations
Singular Perturbation
Dynamic Pull-in
Finite Element
RF Switches
Microbeams
Microplates
MEMS
Electrostatic Actuation
Thermoelastic Damping
Squeeze-Film Damping
Resonators
Online Access:http://hdl.handle.net/10919/11202
http://scholar.lib.vt.edu/theses/available/etd-07062004-141358

Internet

http://hdl.handle.net/10919/11202
http://scholar.lib.vt.edu/theses/available/etd-07062004-141358

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