Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields
The first objective of this dissertation is to present hybrid numerical-analytical approaches and reduced-order models to simulate microelectromechanical systems (MEMS) in multi-physics fields. These include electric actuation (AC and DC), squeeze-film damping, thermoelastic damping, and struc...
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Virginia Tech
2011
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Online Access: | http://hdl.handle.net/10919/11202 http://scholar.lib.vt.edu/theses/available/etd-07062004-141358 |