Optimization of the Process for Semiconductor Device Fabrication in the MicrON 636 Whittemore Cleanroom Facility
The main objective of this work is to develop and optimize a process for the fabrication of basic semiconductor devices in silicon using the Modu-lab toolset in the MicrON 636 Whittemore cleanroom facility. This toolset is designed to work with four-inch silicon wafers, in a class 10000 cleanroom. E...
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/34551 http://scholar.lib.vt.edu/theses/available/etd-08152003-103345 |