The chemistry of metalorganic chemical vapor deposition from a copper alkoxide precursor

The chemistry of chemical vapor deposition from copper (II) dimethylaminoethoxide onto single crystal strontium titanate has been studied by in situ infrared analysis of the vapor phase in the reactor, and by simultaneous mass spectrometer analysis of the reactor outlet gas. Species condensed from t...

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Bibliographic Details
Main Author: Young, Valerie Lynne Vandigrifft
Other Authors: Chemical Engineering
Format: Others
Language:en
Published: Virginia Tech 2014
Subjects:
Online Access:http://hdl.handle.net/10919/38390
http://scholar.lib.vt.edu/theses/available/etd-06062008-170227/