The chemistry of metalorganic chemical vapor deposition from a copper alkoxide precursor
The chemistry of chemical vapor deposition from copper (II) dimethylaminoethoxide onto single crystal strontium titanate has been studied by in situ infrared analysis of the vapor phase in the reactor, and by simultaneous mass spectrometer analysis of the reactor outlet gas. Species condensed from t...
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Format: | Others |
Language: | en |
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Virginia Tech
2014
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Online Access: | http://hdl.handle.net/10919/38390 http://scholar.lib.vt.edu/theses/available/etd-06062008-170227/ |