Direct liquid injection metalorganic chemical vapor deposition of ferroelectric PZT films
A direct liquid injection (DLI) metalorganic chemical vapor deposition (MOCVD) technique was devised to deposit ferroelectric lead zirconate titanate (PZT) films for the first time. By utilizing a cheap DLI precursor delivery system, the problems encountered in the conventional precursor delivery sy...
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| Format: | Others |
| Language: | en |
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/41028 http://scholar.lib.vt.edu/theses/available/etd-02132009-171049/ |