Structure and properties of copper oxide thin films
Copper oxide thin films were prepared on glass substrates by radio frequency sputtering of a sintered CuO target in various argon-oxygen atmospheres. Films sputtered in pure argon consisted of both CuO and Cu₂O due to partial dissociation of CuO during deposition. Sputtering in 10% and 50% oxygen af...
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| Format: | Others |
| Language: | en |
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Virginia Polytechnic Institute and State University
2015
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| Online Access: | http://hdl.handle.net/10919/53054 |