Chemical vapor deposition of silicon dioxide by the oxidation of (A) silicon tetrachloride, (B) silane gas

The service life of furnace refractories could be enhanced by coating them with a thin, dense layer of refractory material which can resist adverse furnace environments. The objective of the present research was to obtain a pure coating of silica, (SiO₂), on the surface of alurnino-silicate refrac...

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Bibliographic Details
Main Author: Reshamwala, Noorulain A.
Other Authors: Materials Engineering
Format: Others
Language:en
Published: Virginia Polytechnic Institute and State University 2016
Subjects:
Online Access:http://hdl.handle.net/10919/64538