Design and Implementation of a Controller for an Electrostatic MEMS Actuator and Sensor
An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable travel range up to 90% of the gap. As a sensor the beam is to be driven into cha...
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| Language: | en |
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2010
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| Online Access: | http://hdl.handle.net/10012/5243 |