Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit
An electrostatic actuator driven by conventional voltage control and charge control requires high actuation voltage and suffers from the pull-in phenomenon that limits its operation range, much less than its entire gap. To provide effective solutions to these problems, we present complete analytical...
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| Language: | en |
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2011
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| Online Access: | http://hdl.handle.net/10012/6269 |