MEMS Actuation and Self-Assembly Applied to RF and Optical Devices
The focus of this work involves optical and RF (radio frequency) applications of novel microactuation and self-assembly techniques in MEMS (Microelectromechanical systems). The scaling of physical forces into the micro domain is favorably used to design several types of actuators that can provide...
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| Format: | Others |
| Language: | en |
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University of Waterloo
2006
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| Online Access: | http://hdl.handle.net/10012/902 |