Optimization of Polishing Kinematics and Consumables during Chemical Mechanical Planarization Processes
This dissertation presents a series of studies relating to optimization of kinematics and consumables during chemical mechanical planarization processes. These are also evaluated with the purpose of minimizing environmental and cost of ownership impacts.In order to study diamond micro-wear and subst...
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| Language: | en |
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The University of Arizona.
2011
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| Online Access: | http://hdl.handle.net/10150/145385 |