THE ION-ASSISTED DEPOSITION OF OPTICAL THIN FILMS.
The columnar microstructure of most thermally evaporated thin films detrimentally affects many of their properties through a reduction in packing density. In this work, we have investigated ion-assisted deposition as a means of disrupting this columnar growth for a number of coating materials. A Kau...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | en |
| Published: |
The University of Arizona.
1987
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10150/184166 |