Phase measurement accuracy limitation in phase shifting interferometry.
In phase shift interferometry (PSI), several factors affect measurement accuracy, such as piezoelectric transducer (PZT) calibration (i.e. PZT slope error) and PZT nonlinearity, vibration, spurious reflection, source bandwidth, detector nonlinearity, and detector noise. The effects of these error so...
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| Language: | en |
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The University of Arizona.
1987
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| Online Access: | http://hdl.handle.net/10150/184252 |