Ion-beam analysis of optical coatings.
Rutherford backscattering spectrometry (RBS) is shown to be an elegant, powerful tool for the chemical characterization of optical coatings. RBS studies of several thin film materials are presented to illustrate the technique's unique abilities, and to show how RBS is best exploited in investig...
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| Language: | en |
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The University of Arizona.
1987
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| Online Access: | http://hdl.handle.net/10150/184273 |