Importance of electrokinetic phenomena in contamination control during semiconductor wet processing.
The adsorption of metanil yellow [3-{{4-(phenylamino) phenyl}} benzene sulfonate] and colloidal silica on a commercially available, positively charge-modified nylon 66 membrane (N66 Posidyne) with an isoelectric point (IEP) of 7.6 was investigated. Challenge testing of N66 Posidyne with a 2.3 ppm co...
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| Language: | en |
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The University of Arizona.
1994
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| Online Access: | http://hdl.handle.net/10150/187005 |