Oxidation and Removal of Thin Organic Films From A Wafer Surface: Fundamentals of Ozonated Water Application and Water Recycle.
A comprehensive Ultrapure Water (UPW) simulator program has been developed to model each unit process in UPW systems, including the entire dynamic system in real time. The program estimates the removal efficiencies for contaminants generated in semiconductor processes and in municipal water supplies...
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| Language: | en |
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The University of Arizona.
2001
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| Online Access: | http://hdl.handle.net/10150/191255 |