Electrochemical Studies in Fluoride Based Solutions for Semiconductor Processing Applications
Fluoride based chemical systems are widely used at various stages in microelectronic processing, particularly for wet cleaning and etching applications. Some examples include the use of semi aqueous fluoride (SAF) solutions in back end of line cleaning, the use of dilute HF solutions as etchants for...
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| Language: | EN |
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The University of Arizona.
2010
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| Online Access: | http://hdl.handle.net/10150/195050 |