Hyper-NA Optical Systems and Applications in Sample Measurement

In this dissertation, vector effects of hyper-NA (NA>1) optical systems are investigated. Several applications of hyper-NA optical systems in sample measurement are demonstrated. Simulation techniques for hyper-NA imaging are developed to illustrate illumination artifacts due to the vector effect...

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Bibliographic Details
Main Author: Zhang, Jun
Other Authors: Milster, Tom D.
Language:en
Published: The University of Arizona. 2010
Online Access:http://hdl.handle.net/10150/195284