Hyper-NA Optical Systems and Applications in Sample Measurement
In this dissertation, vector effects of hyper-NA (NA>1) optical systems are investigated. Several applications of hyper-NA optical systems in sample measurement are demonstrated. Simulation techniques for hyper-NA imaging are developed to illustrate illumination artifacts due to the vector effect...
Main Author: | Zhang, Jun |
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Other Authors: | Milster, Tom D. |
Language: | en |
Published: |
The University of Arizona.
2010
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Online Access: | http://hdl.handle.net/10150/195284 |
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