Liquid-Phase Etching and Chemical Passivation of III-V Semiconductors

The development of metal-oxide-semiconductor field effect transistor (MOSFET) technology relies on new channel materials with higher carrier mobilities that allow faster switching but at lower voltages. III-V semiconductors are suitable for channel materials in n-type MOSFETs due to their higher ele...

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Bibliographic Details
Main Author: Mancheno Posso, Pablo Leonardo
Other Authors: Muscat, Anthony J.
Language:en_US
Published: The University of Arizona. 2016
Subjects:
Online Access:http://hdl.handle.net/10150/612461
http://arizona.openrepository.com/arizona/handle/10150/612461