Potential Environmental and Health Risks from Nanoparticles and III-V Materials Used in Semiconductor Manufacturing
Nanoparticles (NPs) have unique electronic, optical and chemical properties due to the extreme small size. Engineered nanoparticles (ENPs) are intentionally produced for desired applications, with specific properties related to shape, size, surface properties and chemistry. Nano-sized silica (SiO2),...
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| Language: | en_US |
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The University of Arizona.
2017
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| Online Access: | http://hdl.handle.net/10150/623067 http://arizona.openrepository.com/arizona/handle/10150/623067 |