Reaction of aqueous ammonium sulfide on SiGe 25%

SiGe 25% substrates were treated with aqueous solutions of ammonium sulfide with and without added acid to understand the adsorption of sulfur on the surface. X-ray photoelectron spectroscopy showed no sulfide layer was deposited from aqueous (NH4)(2)S alone and instead both Si and Ge oxides formed...

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Bibliographic Details
Main Authors: Heslop, Stacy L., Peckler, Lauren, Muscat, Anthony J.
Other Authors: Univ Arizona, Dept Chem & Biochem
Language:en
Published: A V S AMER INST PHYSICS 2017
Subjects:
Online Access:http://hdl.handle.net/10150/624395
http://arizona.openrepository.com/arizona/handle/10150/624395