Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization

Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization

In this study, slurry availability and the extent of the slurry mixing (i.e., among fresh slurry, spent slurry, and residual rinse-water) were varied via three different injection schemes. An ultraviolet enhanced fluorescence technique was employed to qualitatively indicate slurry availability and i...

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Bibliographic Details
Main Authors: Bahr, Matthew, Sampurno, Yasa, Han, Ruochen, Philipossian, Ara
Other Authors: Univ Arizona, Dept Chem & Environm Engn
Language:en
Published: MDPI AG 2017
Subjects:
slurry availability
slurry injection system
slurry injection position
chemical mechanical planarization
CMP
slurry utilization efficiency
Online Access:http://hdl.handle.net/10150/625063
http://arizona.openrepository.com/arizona/handle/10150/625063

Internet

http://hdl.handle.net/10150/625063
http://arizona.openrepository.com/arizona/handle/10150/625063

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