Carrier Lifetime Measurement for Characterization of Ultraclean Thin p/p+ Silicon Epitaxial Layers

Carrier Lifetime Measurement for Characterization of Ultraclean Thin p/p+ Silicon Epitaxial Layers

abstract: Carrier lifetime is one of the few parameters which can give information about the low defect densities in today's semiconductors. In principle there is no lower limit to the defect density determined by lifetime measurements. No other technique can easily detect defect densities as l...

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Bibliographic Details
Other Authors: Elhami Khorasani, Arash (Author)
Format: Dissertation
Language:English
Published: 2013
Subjects:
Materials Science
Electrical engineering
Carrier Lifetime
Epitaxial Layers
MOS Capacitors
Semiconductor Defects
Semiconductor Device Measurement
Silicon
Online Access:http://hdl.handle.net/2286/R.I.17771

Internet

http://hdl.handle.net/2286/R.I.17771

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