Calibration of MEMS capacitive accelerometers using Electrical Stimulus BIST
abstract: The applications which use MEMS accelerometer have been on rise and many new fields which are using the MEMS devices have been on rise. The industry is trying to reduce the cost of production of these MEMS devices. These devices are manufactured using micromachining and the interface circu...
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| Format: | Dissertation |
| Language: | English |
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2014
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| Online Access: | http://hdl.handle.net/2286/R.I.21039 |