Feasibility Demonstration of a Massively Parallelizable Near-Field Sensor for Sub-Wavelength Defect Detection and Imaging

abstract: To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under insp...

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Bibliographic Details
Other Authors: Mostafavi, Mahkamehossadat (Author)
Format: Doctoral Thesis
Language:English
Published: 2016
Subjects:
Online Access:http://hdl.handle.net/2286/R.I.38360