Feasibility Demonstration of a Massively Parallelizable Near-Field Sensor for Sub-Wavelength Defect Detection and Imaging
abstract: To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under insp...
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Format: | Doctoral Thesis |
Language: | English |
Published: |
2016
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Online Access: | http://hdl.handle.net/2286/R.I.38360 |