An Electrical-Stimulus-Only BIST IC For Capacitive MEMS Accelerometer Sensitivity Characterization

An Electrical-Stimulus-Only BIST IC For Capacitive MEMS Accelerometer Sensitivity Characterization

abstract: Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that ensures the continuous reliability and accuracy is a crucial need....

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Bibliographic Details
Other Authors: Ozel, Muhlis Kenan (Author)
Format: Doctoral Thesis
Language:English
Published: 2017
Subjects:
Electrical engineering
Accelerometer
BIST
Capacitive
Electrical
MEMS
Stimulus
Online Access:http://hdl.handle.net/2286/R.I.46194

Internet

http://hdl.handle.net/2286/R.I.46194

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