Defects and Defect Clusters in Compound Semiconductors
abstract: Extended crystal defects often play a critical role in determining semiconductor device performance. This dissertation describes the application of transmission electron microscopy (TEM) and aberration-corrected scanning TEM (AC-STEM) to study defect clusters and the atomic-scale structure...
Other Authors: | |
---|---|
Format: | Doctoral Thesis |
Language: | English |
Published: |
2020
|
Subjects: | |
Online Access: | http://hdl.handle.net/2286/R.I.57438 |