A study of the optical and electronic properties of amorphous silicon nitride
Amorphous a-SiNx (:H) films have been prepared by radio-frequency sputtering in an argon-nitrogen-hydrogen atmosphere. Both hydrogenated and non-hydrogenated films were studied along with films prepared by the glow-discharge decomposition of a gaseous mixture of silane and ammonia. Photoemission exp...
| Main Author: | |
|---|---|
| Published: |
University of Leicester
1988
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.233638 |