Dry etching and materials in semiconductor fabrication

Dry etching and materials in semiconductor fabrication

Bibliographic Details
Main Author: Banks, Peter Michael
Published: University of Oxford 1989
Subjects:
530.41
Solid-state physics
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.236122

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.236122

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