Silicon on insulator layers for three dimensional circuitry
This dissertation is an account of experimental work conducted at the Microelectronics Research Laboratory of the Physics Department, Cambridge University. Structures have been studied, principally by electron microscopy, to assess the viability of a dual electron beam technique in the production of...
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University of Cambridge
1987
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.236130 |