Inductively coupled radio-frequency discharges

Inductively coupled radio-frequency discharges

Bibliographic Details
Main Author: Chen, Bing-Hung
Published: University of Oxford 1998
Subjects:
530.44
Plasma physics & gas discharges
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244566

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.244566

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